| 摘要 |
PURPOSE:To reduce the errors of detection of a position-detecting mark due to the distortion of waveform by a method wherein the upper and the lower inversion marks are arranged continuously, and the positional deviation of the waveform of each detected signal is made equal and cancelled each other. CONSTITUTION:When the position of a mark is going to be computed based on the column of detected signals from the alignment mark in the scanning type position-detecting mark or the scanning type position detecting device, the positional deviation of each waveform of the signal column is cancelled each other. For example, bars M1-M8 and N1-N4 of automatic positioning AA marks M and N are intersected at an angle of 45 deg. respectively to the scanning line S. In the AA mark M, bars M1, M2, M7 and M8 are arranged in parallel with each other, and bars M3, M4, M5 and M6 are also arranged in parallel with each other respectively. Also, in the AA mark N, the bars N1 and N4 are in parallel with each other, and the bars N2 and N3 are in parallel with each other. |
