发明名称 DICER DEVICE OPERATION CONTROL SYSTEM
摘要 <p>PURPOSE:To automatically diagnose the determination of the replacing time of a diamond blade because of its life with a computer by catching a dicing operation with a computer housed in a dicer device and controlling the frequency of dicings by means of a host computer. CONSTITUTION:A dicing operation caught by each of housed computers 2 is transmitted for each operation to a host computer 3 via a communication interface 7 and a communication line 8, as a communication message. Thereby, the dicing operations caught by the host computer 3 are controlled for each dicer device and, when the frequency of a life which is stored in an auxiliary memory device 6 is over, a field operator is notified of this by means of a CRT 5. Accordingly, the determination of the replacing time because of a life of the diamond blade of a dicer device can be automatically diagnosed by means of the host computer 3, settling the problems such as failure in forming right angles for a changeover groove, unevenness in depth, and the like, caused by the delay in replacing time, thereby, improving yield and stabilization.</p>
申请公布号 JPS63196354(A) 申请公布日期 1988.08.15
申请号 JP19870028283 申请日期 1987.02.12
申请人 HITACHI LTD;HITACHI ENG CO LTD 发明人 SHIOIRI YOSHITAKA;SAKAMOTO KOJI;HAKUTA MAKOTO;TANAKA TATSUO
分类号 H01L21/301;B23Q17/09 主分类号 H01L21/301
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