Fine particle collector arrangement for vacuum pumps.

摘要

The present invention relates to a fine particle collector arrangement for vacuum pumps, in which high temperature walls (12) and low temperature walls (13) are alternately provided in the collecting chamber (1) to form gas flow passage which is extended from the inlet conduit (3) connected with the vacuum processing chamber (4) to the outlet conduit (5) connected with the vacuum pump (6), and the gas flow passage has larger cross section than that of the inlet conduit (3). Fine particles in gas flowing from the inlet conduit (3) are deposited on the each low temperature wall member (13) to be efficiently collected by the thermal creep velocity caused by the thermophoretic force.