| 摘要 |
PURPOSE:To measure the surface shape of a sample with good accuracy by providing an actuator which moves a pickup stylus in parallel to a sample base. CONSTITUTION:For example, piezoelectric elements 30 and 31 are fitted to the actuator 2 of scanning capacitance microscopy and the pickup stylus 1 is moved by the element 30 in a sample moving direction in parallel to the sample base 21 and by the element 31 at right angles to the sample moving direction in parallel to the sample base 21. A frequency setter 34 sends voltages of optional frequencies to those elements 30 and 31 to put the stylus 1 in vibrating motion. An output signal detected by this operation is sent to a signal extracting circuit 25 through a transmission line pickup circuit 4. Here, only the signal of a frequency component set by the setter 34 is extracted from the output signal. Then it is sent to a data processing circuit 11 to accurately obtain a measured value of sample surface roughness per fine unit in an extremely short time.
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