| 摘要 |
PURPOSE:To measure a surface roughness two-dimensionally, by receiving reflected light on a surface of an object or transmission light therethrough with more than one light receiver to determine the cycle and amplitude of waviness of the surface to be inspected from a 2-D received light intensity distribution thereof. CONSTITUTION:Light with a certain intensity pattern is projected to a surface of an object and the current image is caught with a camera. A range (d) of a projection light is determined from the size of an area desired to be measured and the optimum value of an angle theta is selected for each object. For example, when a projection light pattern as shown in a drawing is used, various reflection patterns are obtained on the surface being measured and according thereto, intensity patterns are obtained as shown by the drawing on a light receiving surface in the direction inclined at theta from the projection light. Thus, the cycle and amplitude of waviness of the surface being inspected is determined from the intensity pattern to measure the surface roughness two dimensionally.
|
