发明名称 SAMPLE PEDESTAL FOR SCANNING ELECTRON MICROSCOPE
摘要 PURPOSE:To fit many samples to the same sample pedestal and improve work efficiency by applying cut machining to multiple positions on the side face of the sample pedestal and forming a sample fitting face having the preset inclination angle at multiple positions of the sample pedestal. CONSTITUTION:A cylindrical pedestal 1 made of aluminum is prepared as the cylindrical pedestal. Cut machining is applied at two positions on the side face of this cylindrical pedestal 1, thereby sample fitting faces 3, 4 having the preset inclination angle are formed. Therefore, many samples can be fitted to one sample pedestal, and the number of access times of the sample pedestal to a vacuum sample chamber can be reduced. Accordingly, work efficiency can be improved remarkably.
申请公布号 JPS63190237(A) 申请公布日期 1988.08.05
申请号 JP19870023058 申请日期 1987.02.02
申请人 MATSUSHITA ELECTRONICS CORP 发明人 HATA YOSHIFUMI
分类号 H01J37/20 主分类号 H01J37/20
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