发明名称 MAGNETO-OPTICAL RECORDING FILM
摘要 PURPOSE:To obtain a recording film having a high magneto-optical effect by using a thin binary Ho-Ni alloy film specified in the content of atom.% of Ho to constitute the recording film which has magnetic anisotropy in the direction perpendicular to the film plane and forms an inverted magnetic domain when irradiated with a light beam of a laser, etc. CONSTITUTION:An NoNi film having 1,000Angstrom thickness and an SiN film having 1,000Angstrom thickness are continuously formed by sputtering as the recording film on a glass substrate without breaking the vacuum of magnetron. The film is formed at this time by using an Ni disk carrying an Ho chip as a target and executing sputtering in an Ar atmosphere at the power density controlled to 2W/cm<2> and the sputtering gaseous pressure controlled to 7X10<-1> Pa. The recording film having the magnetic anisotropy in the direction perpendicular to the film plane even at a room temp. is thus obtd. by solutionizing <=8atom.% rare earth metal Ho with respect to Ni which is an iron family transition metal.
申请公布号 JPS63188841(A) 申请公布日期 1988.08.04
申请号 JP19870020927 申请日期 1987.01.30
申请人 NEC CORP 发明人 TOKI KAORU;YUMOTO SEIJI
分类号 C23C14/00;C23C14/14;G11B11/10;G11B11/105;H01F10/12;H01F10/13;H01F10/14;H05K7/12 主分类号 C23C14/00
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