摘要 |
PURPOSE:To obtain a recording film having a high magneto-optical effect by using a thin binary Ho-Ni alloy film specified in the content of atom.% of Ho to constitute the recording film which has magnetic anisotropy in the direction perpendicular to the film plane and forms an inverted magnetic domain when irradiated with a light beam of a laser, etc. CONSTITUTION:An NoNi film having 1,000Angstrom thickness and an SiN film having 1,000Angstrom thickness are continuously formed by sputtering as the recording film on a glass substrate without breaking the vacuum of magnetron. The film is formed at this time by using an Ni disk carrying an Ho chip as a target and executing sputtering in an Ar atmosphere at the power density controlled to 2W/cm<2> and the sputtering gaseous pressure controlled to 7X10<-1> Pa. The recording film having the magnetic anisotropy in the direction perpendicular to the film plane even at a room temp. is thus obtd. by solutionizing <=8atom.% rare earth metal Ho with respect to Ni which is an iron family transition metal.
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