摘要 |
PURPOSE:To permit measurement of a wide range of humidity with high accuracy by dispersing carbon particles into a sol formed by hydrolyzing silicon alkoxide and gelling the sol in the form of a film on a substrate produced by gelling a silica sol and drying and sintering the gel. CONSTITUTION:The conductive particles are dispersed at 0.1-10 molar ratio, for example, C/Si(OR4) (R: alkyl group) in the sol formed by hydrolyzing the silicon alkoxide and such sol is gelled in the form of the film on the substrate produced by gelling the silica sol and drying and sintering the gel. The gel is then dried and sintered. Since the sintered gel has high mechanical strength, the gel does not crack even when immersed in the sol. In addition, the sol bonds securely to the gel, the film does not crack and peel. The sintered gel is quartz glass after sintering and, therefore, withstands severe environment. The measurement of a wide range of humidity with high accuracy is thus permitted.
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