| 摘要 |
PURPOSE:To simplify the constitution of an ellipsometer and to shorten a measurement time by setting the optical axis of irradiation light almost at right angles to a film to be measured and measuring the light intensity of a specific part of the output light of an analyzer by a photodetector. CONSTITUTION:The output light of a laser light source 3 is converted by a lens 20 into parallel light, which is polarized linearly by a polarizer 21 and projected on the film 2 to be measured almost at right angles through a 1/4 wavelength plate 22 and a half-mirror 23. Light reflected by the film 2 to be measured is converted by a lens 24 into parallel light, which is reflected by the mirror 23. Only the light of the part is extracted by a pupil 26 and the photodetector 27 measures the intensity of the light to find the film thickness and refractive index of the film 2 to be measured. Thus, the constitution is simplified and the measurement time is shortened.
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