| 摘要 |
PURPOSE:To simplify a constitution and improve the cleanness of a handling device for conveyance of a semiconductor wear by providing an arm having a retainer on its end and ascenting and descenting freely on a vertical shaft which is constituted to move horizontally. CONSTITUTION:A handling mechanism 1 is contrived to move towards a target position in the horizontal direction parallel to a horizontal guide mechanism 2, 2 and a ascenting-descenting mechanism 3 is contrived to ascent and descent to the lower and closer side of a target position in the vertical direction parallel to a ball screw shaft 6. Next, a carry-in and carry-out actions of a conveying object are done by turning an arm member 5 clockwise with a rotation axis 4 in the center and moving retainers 12 in fixed luci. In this case, the external shape of the arm member 5 is formed in a smooth winglike shape that will not disturb the laminar flow. The constitution can be simplified and the cleanness can be improved by this constitution.
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