| 摘要 |
PURPOSE:To reduce a loss of gas, and to allow the titled device to have a bidirectional property so as to equalize pressure of two kinds of gas, by holding the same pressure without removing gas, when a pressure difference of two kinds of gas is small, and removing gas of the high pressure side,when the pressure difference is large. CONSTITUTION:When gas pressure of gas 1 is higher than that of gas 2, a diaphragm 20 is pushed aside a little toward a chamber 12, and by a tension of the diaphragm 20, the gas 1, of chambers 2, 12 becomes the same pressure. When pressure of the gas 1 becomes higher than that of the gas 2, and the pressure difference becomes large, the diaphragm 20 is pushed aside to the side of the chamber 12. When the gas pressure of two chambers cannot be set to the same pressure by only the tension of the diaphragm 20, and the diaphragm 20 comes into contact with a pressure detector 14 of the chamber 12, a control part 23 opens a solenoid valve 5 of the chamber 2 of a high pressure side, and allows the gas 1 of the chamber 2 to escape to the outside through a relief port 3. When pressure of the gas 1 falls to pressure of the gas 2, and the diaphragm 20 is separated from the pressure detector 14, the solenoid valve 5 is closed, and the chamber 2 and the outside are cut off.
|
