| 摘要 |
PURPOSE:To make it possible to flatten a surface and to reduce the deformation of a pattern and a poor wiring, by a method wherein a light-receiving part is formed in a lateral structure like the constitution of an electronic circuit part. CONSTITUTION:A P-type conduction region 5 is formed in the neighborhood of an N-type conduction region 2 by a selective zinc diffusion method. After electrodes 6 and 7 of a light-receiving part and electrodes 8, 9 and 10 of an electronic circuit part are formed, the crystal surface is covered with a protective film 11 and a wiring pattern 12 is formed by deposition and etching. The potential of the region 2 of the light-receiving part is biased higher than that of the region 5 and light (a) is irradiated between both regions 2 and 5. Whereupon, a signal is inputted in the electrode 9 of the electronic circuit part. Thereby, to flatten the surface becomes possible and the deformation of a pattern and a poor wiring are reduced. |
