发明名称 CLEAN ROOM
摘要 PURPOSE:To hold a predetermined air cleaning degree by variably controlling the rotational speed of a blower sending air into the room in accordance with the dust amount outputted by indoor dust amount measuring means. CONSTITUTION:A blower 3 for sending pressurized air into the clean room 1 through a HEPA (high performance dedusting ability) filter 2, is controlled of its rotational speed by means of a controller 4. An electrical signal corresponding to the amount of dust measured by an automatic dust amount measuring apparatus 5, and the rotational speed of the blower 3 is controlled by the controller 4 is proportion to the amount of dust. Accordingly, it is possible to constantly hold a predetermined cleaning degree, regardless of the variation in the amount of dust generated within the clean room 1.
申请公布号 JPS63180032(A) 申请公布日期 1988.07.25
申请号 JP19870012092 申请日期 1987.01.20
申请人 NEC KYUSHU LTD 发明人 TATEISHI MANABU
分类号 F24F7/06;B01D46/44;H01L21/02 主分类号 F24F7/06
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