| 摘要 |
PURPOSE:To enable friction force to be reduced by converting the rotating motion of a first magnet to the reciprocating motion of a second magnet, and omitting an additional means for sealing. CONSTITUTION:A first magnet 61 and a second magnet 62 are opposingly arranged across a glass for air-tightly partitioning a vacuum-processing chamber. The first magnet 61 is rotated through the rotation of a driving shaft 41 so that the first magnet 61 and the second magnet 62 repeat repulsion and attraction. Consequently, the second magnet 62 repeats such a reciprocating motion that it slides a driven shaft 42 to the left when both magnets are in the repulsive relation while to the right when both magnets are in the attractive relation. Therefore, friction force can be reduced any additional means for sealing.
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