| 摘要 |
PURPOSE:To enable detection of fine harmful defects in real time, by scanning a surface defect of a strip material fast running with a small beam spot. CONSTITUTION:Laser light from a laser light source 2 is made to irradiate a material 1 to be inspected via a collimator 3, a total reflection mirror 4, a rotary polyhedron mirror 6 and a scan parabolic mirror 5 to scan. Reflected light thereof is received with a photomultiplier 9 for direct reflected light and a photomultiplier 10 for scattered light to be amplified 11-1 and 11-2 as signal. Then, it is inputted into a decision circuit 13 for presence of flaws via band pass filters 12-1, 12-4. Compressed flaw information from a flaw signal compression circuit 15 is stored into image frame memories 16-1 or 16-2 of an image memory control circuit. When a flaw presence signal is inputted through a control signal generator 14 from the flaw presence decision circuit 13, a flaw pattern recognition equipment 17 is started and a signal of the memory 16-1 or 16-2 is inputted thereinto to recognize the type and degree of flaws according to a flaw type recognition pattern preset or the like.
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