| 摘要 |
PURPOSE:To prevent securely a vacuum pump from adsorbing infinitely the atmosphere by disposing a cylinder provided with a piston between the vacuum pump and a plurality of suckers and affording communication between one chamber in the cylinder and the sucker side and between the other chamber and the vacuum pump side with the piston being sandwiched by both cylinders. CONSTITUTION:A plurality of suckers 12 disposed adjacent the workpiece 13 side to be adsorbed are connected to a vacuum pump 11. And in front of the respective suckers 12 on the way of a path from the vacuum pump 11 to each sucker 12 are disposed respectively cylinders 18 provided with pistons 19 respectively. And one chamber 20 and the other chamber 21 in the cylinder 18 sandwiching the piston 19 communicates respectively to the sucker 12 side and the vacuum pump 11 side. Then, even if the workpiece 13 to be adsorbed to the sucker 12 is absent or the sucker sticks only partially to the workpiece 13, the atmosphere is sucked in only by the volume of piston stroke in the cylinder 18. Thus, the sucker can be prevented from adsorbing the atmosphere infinitely.
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