| 摘要 |
PURPOSE:To inexpensively produce a small size and capacity pump by partially forming a fluid passage having check valves arranged at inlet and outlet ports respectively of a movable wall, and coupling a piezoelectric vibrator with the movable wall. CONSTITUTION:A disc-shaped recess 2 is provided on the side of a disc-shaped base 1, and a cylindrical box body 3 having a bottom is threadably attached opposite to the recess 2, and the peripheral edge of a cylindrical diaphragm 4 is fixed to the above-mentioned threadably attached part. A driving element 6 fixed onto the tip of a long laminated piezoelectric vibrator 5 is fixed on the central part of the diaphragm 4, and the base 7 of the vibrator 5 is slidably fitted in a hole 8 on the bottom of the box body 3. Guide holes 10, 11 for transported fluid are provided at two positions diametrically opposite in the recess 2, and their tips are provided with check valves 12, 13. In addition to that, an air pump coupling part 15 and a closing valve 16 are provided between the check valve 13 on a discharge side and the coupling part 14 of a conduit to fill the check valve 13 and the recess 2 with liquid in starting a pump.
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