| 摘要 |
PURPOSE:To avoid risk of leaking due to breakdown of bellows and to improve reliability, by providing a minute gap, in which an exhaustion system is connected, between an orifice in a beam line and an orifice in an X-ray transfer device, and minutely vibrating a diaphragm. CONSTITUTION:X-rays 2 from a synchrotron are guided to an X-ray transfer device through a partitioning-wall main body 6 of a vacuum partitioning wall 4. When a driving source 8 is operated, the partitioning-wall main body 6 is minutely vibrated. Nonuniformity of X-ray intesity distribution in a plane due to the roll trace of a beryllium or aluminum thin film of the partitioning-wall main body 6 is removed. Meanwhile, a gas which is adverse to the vacuum degree on the side of the X-ray transfer device flows through a minute gap between the vacuum partitioning wall 4 and a guide 3. The gas tends to flow into the side of a beam line 1, which is in a very high vacuum degree. Since the minute gap between the beam line 1 and the vacuum partitioning wall 4 and the minute gap between the vacuum partitioning wall 4 and the guide 3 communicate with a large-capacity turbo-molecular pump 10, the vacuum degree on the side of the synchrotron is not decreased. |
