| 摘要 |
PURPOSE:To achieve a higher efficiency of measuring work with a reduction in the photographing time while facilitating the discrimination of a defect or the like, by measuring a false defect part with a lowered ray source voltage after the preparation of an X ray transmission image with the heightening of the ray source voltage. CONSTITUTION:X rays with a high intensity are generated with the heightening of a ray source voltage of an X rays generator 4 to irradiate an object 6 to be inspected in a short time and the transmission X rays are detected with a detector 18. A detection signal of the detector undergoes an arithmetic processing with a computer 10 to form a transmission image 13, which is displayed on an image display device 11 to discriminate the presence of a defect. Then, with the lowering of the ray source voltage, a false defect part is irradiated with X rays for a specified time to measure and an image 13 clear with a high contrast is obtained. This enables measurement of the state of a defect easily in a short time. |
