| 摘要 |
PURPOSE:To improve the efficiency of a vertical position control magnetic circuit by vertically forming a magnetic gap formed in the magnetic circuit with respect to a position control direction. CONSTITUTION:Levitation electromagnet rows 27, 28 are laid on both inner walls opposed to the lower surface of the guide 23 at the bottom 25 of a moving body 24. Further, in order to control a vertical position with respect to a moving direction, position control electromagnets 31, 32 are so secured to the inner wall of the body 24 as to correspond to the upper surface of the guide 23. The electromagnets 31, 32 are formed in U-shaped section at a yoke 33, and particularly formed at one end widely. Further, the relationship between the electromagnets 31, 32 and the guide 23 is so set that the edge 43 of the guide 23 is opposed at substantially intermediate position 4 of the wide yokes of electromagnetic coils 31, 32.
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