| 摘要 |
PURPOSE:To measure the concn. distribution of an element, by driving a specimen amount table to measure concn. data at every displacement of a specimen. CONSTITUTION:The X-rays from an X-ray tube 31 pass through the window of a collimator 33 for photon source to irradiate the specimen 35 to be measured on a turntable 34. The turntable 34 is set on a specimen rotating/horizontal running mechanism 36 and the specimen 35 can be rotated or can be allowed to horizontally run in the direction shown by an arrow 38. The X-rays transmitted through the specimen 35 transmit through the window of a collimator 39 for a detector to be incident to an X-ray detector 41. The detection signal 42 obtained by the detector 41 is inputted to a measuring circuit system 43 to perform peak analysis. A processing computer 44 performs the giving and receiving of the data 45 with respect to the measuring circuit system 43 to perform the operational processing of projection data. At this time, the mechanism 36 is driven to collect the projection data of the specimen in the respective directions thereof and said data are operated to make it possible to measure the concn. distribution of an element.
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