| 摘要 |
PURPOSE:To prevent drawing-in of bubbles, by a method wherein, in a method of laminating a viscous film piece to a wafer and the like, the tip part of the viscous film piece peeled from a beltform material and the tip part of an adherend are contact- bonded to each other, and are fed in between a take-off roller pair. CONSTITUTION:An adherend A, e.g. silicone wafers, conveyed by a conveyor 2 is positioned on an adsorption table 3. Meanwhile, a viscous film piece B is peeled from its tip part through movement of a beltform material T by means of a pinch roll pair 10, is adsorbed to a perforated belt 21 and when a rear end is detected by A detector 13, the film piece is stopped, and is relatively positioned to the adherend A. The tip of the belt 21 is pressed down, and a front division body 11a of a peeling member 11 is rotated downward to press the tip part of the viscous film piece B against the tip of the adherend A. Adsorption by the adsorbing table 3 is released to move upward the belt 21, and through movement of the conveyor 2 and take-off of the beltform material T, the viscous film piece and the adherend are fed between take-off roll pair 30 for lamination. This constitution enables execution of lamination so that entrance of bubbles is prevented from occurring and wrinkles are prohibited against production. |
