发明名称 METHOD AND APPARATUS FOR INSPECTING TRANSPARENT SUBSTRATE OR TRANSLUCENT SUBSTRATE
摘要 PURPOSE:To achieve discrimination of flaws easily and accurately, by running a transparent or translucent material between polarizing plates arranged to be orthogonal to each other to detect flaws by light transmitted therethrough. CONSTITUTION:Transparent or translucent substrate 5 runs between polarizing plates 1 and 2 arranged orthogonally to each other and is irradiated with light from a light source 3 arranged therebelow to detect a transmission light with a light receiving section 4. When a flaw is present on the substrate 5, the scattered light thereof is incident on the light receiving section 4, thereby enabling discrimination of the presence of flaws easily and accurately.
申请公布号 JPS63163152(A) 申请公布日期 1988.07.06
申请号 JP19860314572 申请日期 1986.12.24
申请人 HITACHI CONDENSER CO LTD 发明人 YASUI SEIJI;OSADA MINORU;YAMAGUCHI HIROSHI
分类号 G01N21/21;G01N21/89;G01N21/896 主分类号 G01N21/21
代理机构 代理人
主权项
地址