| 摘要 |
PURPOSE:To obtain safely a substance with sufficient purity, by keeping the temp. of the substance to be cleaned at >=150 deg.C after the washing water is replaced with freon rinse, etc., and projecting ultraviolet rays on the surface of the substance to be cleaned under the existence of oxygen, etc. CONSTITUTION:The surface of the substance to be cleaned, such as a glass base plate or metallic plate, is washed with a washing agent, and the washing water is replaced with freon rinse or freon vapor, and then, the substance to be cleaned is heated to >=150 deg.C, and the surface of the substance to be cleaned is irradiated with ultraviolet rays under the existence of oxygen or inert gas to completely replacing the washing water. In this washing water replacing method, as the washing water is replaced with freon or freon vapor, the safety is extremely high, and the cost of the equipment is low. And, as the ultraviolet ray irradiation makes high temp., the reaction is activated with a result that the high purity is obtained in a short time. |
