| 摘要 |
PURPOSE:To lighten and miniaturize a wafer boat, and to set wafers easily in conformity with the desired number of setting by combining and constituting a plurality of split wafer boats in the direction of furnace length of a vertical furnace. CONSTITUTION:A wafer boat 5 has a plurality of split wafer boats 30. These split wafer boats 30 are combined in the direction of furnace length (the vertical direction) of a vertical furnace (a vertical type diffusion furnace 1), thus organizing the wafer boat 5. The split wafer boats 30 as required are combined in conformity with the number of semiconductor wafers (such as silicon wafers 31) to be treated. A plurality of piled up split wafer boats 30 are set into the vertical type diffusion furnace 1. |
