| 摘要 |
PURPOSE:To correct an optical characteristic corresponding to a position on a mask, by placing a transparent plate whose thickness is different depending on a place, in an optical path between the mask and a projection optical system, and correcting a characteristic of the projection optical system. CONSTITUTION:A correcting plate (transparent plate) 15 whose thickness is different depending on a place is supported by a supporting base 14 and placed in an optical path between a mask 11 supported by a supporting base 12, and a projection optical system 16. In such a way, an optical characteristics corresponding to a position on the mask 11 can be corrected, and also, when the correcting plate 15 is make once, it will suffice that it is only placed in the optical path, and a special control system for an arrangement is not required.
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