| 摘要 |
PURPOSE:To make the compsn. of thin films uniform, by arranging plural sectorial sections made of one of the constituents of a thin alloy or compd. film around the center of a target. CONSTITUTION:A metal- or nonmetal-base target body 2 is prepd. and plural sections 5 made of other metal or nonmetal is arranged on the body 2. The sections 5 may be sectorial sections having the same ratio in length in the circumferential direction at radial positions within a certain range. When the resulting target is used, the compsn. of thin films formed on substrates 6 is made uniform. |
