摘要 |
A method of making cadmium mercury telluride infra-red detectors according to which a wafer of CMT (1) mounted on a substrate (2) is masked and etched to divide it into an array of detector elements (5). The array and substrate are then masked and metallized, and the mask is removed to leave a pattern of contacts (9) and electrodes (10) to each detector element (5). In an alternative method (Fig. 6), the electrodes (10) are first formed on the substrate (2), then the CMT wafer (1) is mounted on the substrate and, by masking and etching, divided into elements (5). Finally, metal contacts are formed to connect each element to its respective electrodes. |