摘要 |
PURPOSE:To enable mass-production while maintaining a high degree of accuracy for fine grooves by transferring the pattern of grooves from a dressing dresser onto a grindstone with the use of a block dresser to which diamond particles are stuck on its front surfaces between grooves in dies, thereby to form a fine groove machining tool. CONSTITUTION:In the case of manufacturing a block dresser 1 having a high degree of pitch accuracy, a slicing machine for manufacturing LSIs (large scale integrated circuit), which may form grooves with a high degree of pitch accuracy is used, so as to form grooves one by one in order to obtain a highly accurate block dresser dies, and diamond particles are stuck on the outer surfaces of convex parts between each adjacent grooves by an electro-deposition method so as to produce a diamond block dresser. By using the diamond block dresser, the pattern of grooves is transferred to a grind stone to produce a fine groove processing tool 1 with which creep-feed grinding is carried out to simultaneously form a plurality of fine grooves 2. Since the transfer of the pattern of the grooves onto the grindstone may be made as mentioned above, the reproducibility of processing accuracy may be high, and therefore, a large number of articles may be produced with a uniform quality, that is, the abovementioned method is suitable for mass-production.
|