摘要 |
PURPOSE:To detect the state of drive quantitatively by mounting an electrode for detecting oscillations and detecting the quantity of displacement from the resonance frequency of driving frequency. CONSTITUTION:An oscillatory wave motor is constituted of a rotor 1, a vibrator 3, a polarization-treated piezoelectric body 4 attached on the vibrator, and an electrode 5; a stator is formed by the vibrator 3 and the piezoelectric body 4; and the rotor 1 frictionally brought into contact with the stator is rotated and driven. The electrode 5 is shaped by electrodes 5, 5a, 5b for drive and an electrode 5s for detecting oscillations, the electrode 5a organizes a piezoelectric body having phase A, and the electrode 5b constructs a piezoelectric body having phase B. Progressive oscillatory waves are generated on the vibrator 3 by applying frequency voltage phase of which differs at 90 deg. to the electrodes 5a, 5b at that time, and the rotor 1 is driven by said oscillatory waves. The state of the oscillations is detected by the electrode 5s, and phase difference is detected to detect displacement from the resonance frequency of driving frequency when a drive signal is displaced from resonance frequency. |