| 摘要 |
PURPOSE:To selectively perform a rough motion and a fine motion by using an actuator having a first driving part in which plural piezoelectric bodies are laminated through an electrode in the axial direction, and a second driving part in which piezoelectric bodies whose number is different from the piezoelectric bodies of the first driving part are laminated. CONSTITUTION:On the upper face of a substrate 10, supporting plates 12, 26 are provided vertically. To the center part of the supporting plate 12, a differential micrometer 14 is fixed. In front of the front end part of the micrometer 14, a first actuator 16 is provided coaxially, and to the front end, a scanning needle 24 is fixed. To the other end side of the substrate 10, a second actuator 22 of a laminated composite type is fixed by the supporting plate 26. The second actuator 22 consists of the first and the second driving parts 30, 32, and when a first power source circuit 40 is driven, the driving part 30 expands and contracts, and when the second driving part 42 is driven, the driving part 32 expands and contracts.
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