| 摘要 |
<p>PURPOSE:To stably and quickly detect a foreign matter by detecting a reflected light from an area to be detected, illuminated by a band-shape lighting means, by a lens array, a light shielding means for making an aperture variable, and a photoelectric transducer. CONSTITUTION:A band-shape lighting means 4 is provided on the surface of a pellicle 3 which becomes an object to be inspected, and illuminates on the pellicle 3 in a band shape. On this band-shape lighting area, a lens array 6 on which an image forming lens being minute, and also, executing a parabolic refracting distribution is arranged at a small pitch is placed. This lens array 6 projects a scattered light image by a foreign matter existing at the band-shape lighting area, to the photoelectric transducer 8. Therefore, a foreign matter inspection can be executed by the same sensitivity at the center of the pellicle 3 and its periphery. Also, on the pellicle side of the photoelectric transducer 8, a light shielding part 7 making the aperture variable in accordance with the shape and the size of the pellicle is provided. This light shielding part 7 prevents a stray light such as a reflected light etc., from a pellicle frame 2, from being made incident on the photoelectric transducer 8, and a stable foreign matter inspection can be attained.</p> |
