摘要 |
PURPOSE:To obtain a large longitudinal displacement by a low driving voltage by flatly grinding the end faces of a plurality sets of piezoelectric units sintered integrally opposed to a thick insulating plate to be bonded to reduce the thickness of laminated piezoelectric elements, thereby freely increasing the quantity. CONSTITUTION:A first piezoelectric element 1 is formed by molding piezoelectric porcelain material powder from its slurry by a doctor blade method, forming unsintered materials coated with metallized pastes 12a, 12b made of refractory metal, such as W, Mo, on both main surfaces of a green sheet cut in a square shape, and interposing another green sheet which becomes a second piezoelectric element 2 of the same quality and same size to be laminated between unbaked materials to become the first element 1. Green sheets which become insulating plates 3 of both end faces of substantially the same quantity and size as them are laminated on both axial ends of the laminate, pressbonded, and then sintered. The end faces of the insulating plates at both ends of the laminate thus sintered are flatly ground to form one piezoelectric unit P. A plurality of the devices are bonded coaxially with a low melting point glass or resin adhesive, and the piezoelectric element group of a plurality sets of the units P are connected by a pair of leads in parallel to form a multilayer piezoelectric device. |