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发明名称
FLUORESCENT CORROSIVE FLUORIDE SOLUTION
摘要
申请公布号
EP0140347(B1)
申请公布日期
1988.06.22
申请号
EP19840112916
申请日期
1984.10.26
申请人
UNION CARBIDE CORPORATION
发明人
AMSTUTZ, GARY ARTHUR;MAYEKAR, KISHOR DATTATRAY
分类号
C09K11/06;(IPC1-7):C09K11/06;H01L21/306;G01N21/64;C23C22/34
主分类号
C09K11/06
代理机构
代理人
主权项
地址
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