| 摘要 |
PURPOSE:To reduce parasitic capacitance without making an insulation film thick by providing a cavity just below outgoing electrodes. CONSTITUTION:A cavity 6 is prepared just below outgoing electrodes 5 by removing a Ti layer of the outgoing electrodes 5. If, for example, it is assumed that a thickness of the cavity 6 is identical to that of an insulation film 4, 1/4 of parasitic capacitance will be included in a collector side in parallel, because a relative dielectric constant of air is 1. Accordingly, parasitic capacitance if reduce to 1/3 on the whole.
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