| 摘要 |
PURPOSE:To measure the bonding energy in a depth direction regardless of the kind of a sample by dividing the anode of an X-ray generator into plural segments consisting of different elements and switching them, and computing a difference spectrum. CONSTITUTION:The anode 3 is divided into the plural segments 3a-3c, which are formed different elements. The sample 2 is mounted and the segment 3a, e.g. Mg is selected and analyzed, and then the sample 2 is radiated with a characteristic X ray emitted by Mg and photoelectrons are emitted from a depth of about 10Angstrom determined by the X-ray energy. The energy of the photoelectrons is detected by an energy analyzer 7 and stored in a storage circuit 6a. Then a switch 5 is switched to the segment 3b and the sample 2 is radiated with a characteristic X ray of Ti, and photoelectrons are emitted at a place of 20Angstrom from the surface. Their energy is stored in the circuit 6a. Then, respective spectra are read out of the circuit 6a to an arithmetic unit 6b to obtain a spectrum after a spectrum based upon the characteristic X ray of Mg is removed.
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