发明名称 PATTERN DETECTING METHOD
摘要 PURPOSE:To decide the center of a pattern with high accuracy by calculating the moment at each point of a differential signal to obtain a zero-cross point and deciding the center of a pattern. CONSTITUTION:The video signals supplied from an image pickup device 1 are sampled in a prescribed cycle and the digitized picture data is stored in a picture memory 3. These picture data are integrated at every window and every direction Y and the differential data Lb(x) is outputted from a differential device 5. A noise eliminator 6 outputs the data containing no noise signal and a moment Mx within width P0 is calculated for each point (x). A center detector 8 detects a zero-cross point from the moment Mx and decides the point (x) as the center xc of a window. The center values xc are sent to a center deciding means 9 at every window and a histogram is produced for the value xc at every window. Thus the center xc' of a mark pattern is decided.
申请公布号 JPS63147282(A) 申请公布日期 1988.06.20
申请号 JP19860294362 申请日期 1986.12.10
申请人 CANON INC 发明人 TERUI HIROSHI
分类号 G03F9/00;G01B11/00;G01N21/88;G01N21/956;G06T1/00;G06T7/00;G06T7/60;H01L21/027;H01L21/30;H01L21/68 主分类号 G03F9/00
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