摘要 |
PURPOSE:To reduce the quantity of parts and to simplify the adjustment of assembling by coaxially disposing a light reflection mirror, a sample board, an ion reflector, and an ion detector, and commonly guiding respective lights, which are radiated form a laser light source and an illuminating light source, to the reflection mirror. CONSTITUTION:Ions emitted from a sample 2 pass through respective ion via apertures 24a and 34a of a reflection mirror 24 and an ion detector 34, both of which are disposed on a coaxial line L, and they enter an ion reflector 30. Therefore, when ions are guided to the ion detector 34, it makes unnecessary to slantly install the ion reflector 30 and to dispose an ion deflector for deflecting ions. A reflecting light from the sample 2 is reflected on the reflection mirror 24, and next it advances to a focusing lend 22 and passes through a dichroic mirror 16 and so it is guided inside an observation microscope 10. Therefore, the light reflection mirror 24 is used jointly for the reflection of an illuminating light source 8 and that of a laser light source 6 so that an optical system can be simplified. |