| 摘要 |
Method of profile control of a rotated model (MDL). Speed components Vz and Vx in a first direction (Z-axis direction) which connects the center of a stylus (ST) to the center of rotation of the model (MDL) and in a second direction (X-direction) which is orthogonal to the first direction are calculated by use of three-dimensional displacement quantity of the stylus. The distance L between the center of the stylus and the center of rotation of the model is supervised and the angular speed W of rotation of the model is determined by use of this distance L and the speed component Vx in the second direction. The stylus is moved in the first direction by the speed component Vz and the model is rotated with the angular speed W thus determined in order to make profile control. |
