| 摘要 |
PURPOSE:To form a ceramics processed diaphragm in which a high-frequency sound resonance frequency is increased, by varying the thickness of the diaphragm partially through a process where a ceramics is formed in multilayer structure by masking at least for one or more times with a resist agent, in the manufacture of the ceramics processed diaphragm. CONSTITUTION:For example, a metallic substrate 1 made of an aluminium molded in a cone shape and having thickness of 50mum is prepared, and a first ceramics layer 2 having thickness of 5mum is formed by an electroanalysis method. Next, a peripheral part 7 side is masked with the resist agent 3, and a second ceramics layer 4 having thickness of 5mum is formed by the electroanalysis method. Furthermore, the masking of the peripheral part 7 side is extended with the resist agent 5, and a third ceramics layer having thickness of 5mum is formed by the electroanalysis method. Next, by removing the resist agents 3 and 5, the diaphragm consisting of a ceramics film 9 whose thickness is varied at the peripheral part 7 and a summit part 8 can be obtained. Thus, it is possible to obtain the ceramics processed diaphragm in which the thickness is varied at the specific part of the diaphragm and which satisfies a various kinds of requests on acoustic conditions.
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