发明名称 SPUTTERING TARGET
摘要 PURPOSE:To obtain a sputtering target which forms a heat resistant protective layer without generating cracks when projected with laser light having a large spot diameter by dispersing a compd. which does not solutionize with chalcogenide of metal nearly uniformly into said chalcogenide. CONSTITUTION:The sputtering target is obtd. by using the chalcogenide of the meal and the compd. which does not solutionize therewith as essential components and dispersing the above-mentioned compd. nearly uniformly into the above-mentioned chalcogenide. For example, zinc chalcogenide such as ZnS, ZnSe and ZnTe and lead chalcogenide such a PbS, PbSe and PbTe are used as the above-mentioned chalcogenide of the metal and, for example, oxides such as SiO2, GeO2, In2O3, and TeO2, nitrides such as Si3N4 and carbides such as SiC are used as the above-mentioned compd. This target forms the heat resistant protective layer to realize an optical disk which can be initialized quickly without generating cracks when projected with the laser light having the large spot diameter and is stable against environmental changes.
申请公布号 JPS63143254(A) 申请公布日期 1988.06.15
申请号 JP19860289227 申请日期 1986.12.04
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 AKIYAMA TETSUYA;UCHIDA MASAMI;INOUE KAZUO;KODERA KOICHI;MATSUBARA KUNIHIRO;OTA TAKEO
分类号 C23C14/34 主分类号 C23C14/34
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