| 摘要 |
PURPOSE:To calibrate the light source origin of a multi-slit light source and the angle of projection of a slit light source by projecting multi-slit light from the multi-slit light source on calibration planes which vary in height in order and using their projection points as base points. CONSTITUTION:The multi-slit light from the multi-slit light source 1 is projected while the calibration planes 2-1-2-n are varied in height in order. Slit light beams lj are estimated from projection points Pm<j> (j=1, 2, ... N, m=a, b, ..., n) obtained on the calibration plates 2-1-2-n with the same slit light and the intersections of the slit light beams lj are used as the light source origin L0 of the multi-slit light source 1. Then the slit light beam is calculated including the light source origin L0 and the angle of projection of a slit light plane pij is calculated from the inclination indicated by the linear equation of the slit light beam.
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