发明名称 CONVEYING DEVICE FOR TEST AND INSTRUMENTATION OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To contrive to occupy the standby of semiconductor devices and the extent of a stock yard in a preheated state in a small area and to easily perform the maintenance of preheating of the semiconductor device which are on standby by a method wherein the semiconductor devices at feed-in positions are step-transferred to test positions in parallel to one another between the respective guide parts of a fixed rail member and a movable rail member. CONSTITUTION:The feed-in positions P of ICs 11 are applied to the guide parts 22a of a feed-in rail member 22, consequently to the end part starting sides of a fixed rail member 21 and the test positions Q of the ICs 11 are applied to the guide parts 21b on the terminal part side of the fixed rail member 21. In this case, the number of pieces of the guide parts 21a of the fixed rail member 21 is 5 pieces including the guide part 21b, which is located at the right end and used as the test position Q, the number of pieces of the guide parts 22a of the movable rail member 22 is also the same number as above, the number of pieces of the above ICs 11, which are on standby within the extent S of a stock yard and put in a preheated state, is 4 pieces, the arrangement on standby and in a preheated state of the ICs 11 comes to be juxtaposed in the longitudinal direction and the extent S of the stock yard results in occupying an area of a small dimensional ratio of width to length.
申请公布号 JPS63141340(A) 申请公布日期 1988.06.13
申请号 JP19860288201 申请日期 1986.12.03
申请人 MITSUBISHI ELECTRIC CORP 发明人 NISHIBASHI RYOJI
分类号 H01L21/66;B65G47/08;G01R31/00;G01R31/26 主分类号 H01L21/66
代理机构 代理人
主权项
地址