发明名称 WIRE BONDING
摘要 PURPOSE:To bond a wire positively without forming a metallic ball at the tip of the metallic small-gage wire by using a capillary not limited in the direction of movement by controlling the operation of the capillary. CONSTITUTION:A capillary 13 in which a metallic small-gage wire 14 is projected from a nose in predetermined length prior to bonding is arranged to the upper section of a wire-tip position 11'' set separate slightly from a position 11' where the small-gage wire 14 is bonded, and the capillary 13 is lowered until the tip of the metallic small-gage wire 14 is brought into contact with the wire-tip position 11''. The tip of the metallic small-gage wire 14 is shifted to the position 11' where the small-gage wire 14 is bonded while the capillary 13 is brought down, the metallic small-gage wire 14 is pressed down by the nose of the capillary 13, and ultrasonic vibrations are applied to the metallic small-gage wire 14 and the metallic small-gage wire is bonded. Accordingly, the metallic small-gage wire 14 can be bonded without shaping a metallic ball at the tip of the metallic small-gage wire 14 by employing the capillary 13 not limited in the direction of movement.
申请公布号 JPS63138744(A) 申请公布日期 1988.06.10
申请号 JP19860285169 申请日期 1986.11.29
申请人 NEC KANSAI LTD 发明人 ZAITOU TADANORI
分类号 H01L21/607;H01L21/60 主分类号 H01L21/607
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