| 摘要 |
PURPOSE:To obtain accurate rotational displacement by providing the titled device with three radial flexible beam displacing mechanisms respectively generating rotational displacement around three rectangular axes. CONSTITUTION:The device is constituted of a square ring 15, radial flexible beam displacing mechanisms 16M(16Mxa-16Myb) for generating rotational displacement around x and y axes, rigid parts 17a, 17b, 18a, 18b, a central rigid part 20, projecting parts 21a, 21b projecting from the rigid part 20, the radial flexible beam displacing mechanisms 21M(21Mza-21Mzb), a fine movement table 23, and a fitting board 24. The table 23 is fixed on the rigid parts 18a, 18b and the central rigid part 20 is fixed on the fitting board 24. Consequently, accurate rotational displacement around the x, y and z axes to be the reference axes of respective mechanisms can be executed by controlling the driving of respective radial flexible beam displacing mechanisms 16M, 21M. |
