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发明名称
PROCESS FOR TRANSITION METAL NITRIDES THIN FILM DEPOSITION
摘要
申请公布号
EP0174743(A3)
申请公布日期
1988.06.08
申请号
EP19850305747
申请日期
1985.08.13
申请人
MORTON THIOKOL, INC.
发明人
MELAS, ANDREAS A.
分类号
C01B21/06;C23C16/34;H01L21/285;H01L29/45;(IPC1-7):C23C16/34
主分类号
C01B21/06
代理机构
代理人
主权项
地址
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Soporte publicitario
COMPOSICION ELASTOMERA
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DISPLAY DEVICE
