发明名称 PROCESS FOR PREPARING SINGLE CRYSTAL
摘要 <p>: The invention provides a process for preparing a single crystal which comprises drawing up a single crystal by the Czochralski process and cooling it from a temperature not lower than 600.degree.C under a reduced pressure or in vacuo. The process provides a single crystal having a dislocation density of 1.5 x 104 cm2 or less.</p>
申请公布号 CA1237640(A) 申请公布日期 1988.06.07
申请号 CA19840456243 申请日期 1984.06.08
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD.;NIPPON TELEGRAPH AND TELEPHONE CORPORATION 发明人 KAWASAKI, AKIHISA;TADA, KOHJI;KOTANI, TOSHIHIRO;MIYAZAWA, SHINTARO
分类号 C30B15/00;C30B15/14;C30B27/02;H01L21/208;(IPC1-7):C30B15/14 主分类号 C30B15/00
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