| 摘要 |
PURPOSE:To sequentially send out an atom, a molecule, or a radical one by one and to irradiate ion beams having uniform diameter into a high vacuum by passing the atom or the molecule through the crystal defect of a single crystal. CONSTITUTION:An atom or a molecule is passed through the crystal defect of a single crystal: the gas 3 or liquid of hydrogen atom or molecule is passed one by one through the crystal defect 2 in a single crystal 1 comprising Si, Au, W, Mo, and Pt. Hydrogen is passed in a form of H* radical 4 and irradiated as a H<+> ion beam 5. Thereby, the fine ion beams are irradiated into a high vacuum.
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