| 摘要 |
PURPOSE:To enable a long continuous run, to increase the input power, and to increase the throughput of the title device by arranging plural rod electrodes constituting a second discharge electrode in parallel with each other on the peripheral surface of a virtual cylinder covering the surface of a drum-shaped first electrode. CONSTITUTION:The drum-shaped first discharge electrode 2 on the peripheral surface of which a sheet material A travels and the second discharge electrode 3 opposed to the electrode 2 are provided in a vacuum vessel 1. Plural rod electrodes constituting the second discharge electrode 3 are arranged in parallel with each other on the peripheral surface of the virtual cylinder covering the peripheral surface of the electrode 2, both ends of the electrode 3 are collected by a retaining member to form a basket-shaped structure, and both electrodes are retained in the vacuum vessel through an insulating material. As a result, local light emission and the generation of instantaneous abnormal electric discharge are reduced, discharge is stabilized, a long continuous run is made possible, the input power is increased, and the plasma treating device for a sheet material having a large throughput per device can be obtained. |
