| 摘要 |
PURPOSE:To enhance the photoconductive characteristic and, especially, the photoelectric conversion efficiency by a method wherein, in a photoelectric transducer which has a laminated structure composed of a P-type layer, an N-type layer and an I-type layer, and is constructed of a deposited film composed of silicon and germanium as one constituent for the I-type layer, different types of active species composed of a chemical substance which chemically interacts with one constituent for the I-type layer are introduced into the space between films separately so as to cause a chemical reaction and to eliminate the introduction of an impurity. CONSTITUTION:As a compound, containing silicon and halogens, producing active species A, e.g., a compound which has substituted a part or all of hydrogen atoms of a chain silane compound or a ring silane compound, for halogen atoms is used; as the compound, containing germanium and halogens, producing active spicies B, e.g., the compound which has substituted a part or all of hydrogen atoms of a chain hydrogenated germanium compound or a ring hydrogenated germanium compound, for halogen atoms is used; as a chemical substance, for formation of a film, producing an active species C, a gas of hydrogen and/or a halogen compound are used. After the active species A, B and C have been introduced into a reaction chamber 406, a chemical reaction is caused and a film is formed on a substrate. |
